Silicon Manufacturing Down to 3nm & Below

Early Process Development. Advanced Lithography. Yield Management.

Silicon engineering is the foundation for generations of chips and electronics innovations. Based on industry standards, our silicon engineering tools are production-proven at both established and emerging process nodes down to 3nm and below. Our tools optimize tradeoffs between speed, area, power, test, and yield.

Industry-leading TCAD tools for process and device simulation

• Develop and optimize semiconductor processing technologies and devices
• Perform simulation split runs to reduce costly, time-consuming test wafer runs when developing
  a new device
• Explore the process parameter space and product design alternatives
• Optimize chip performance using parasitic information obtained from interconnect modeling and extraction tools

CATS® software for mask-manufacturing excellence

• Transcribe complex design data into machine-readable instructions for pattern generation
  and manufacturing
• Rely on the industry’s highest performance solution for mask rule check and pattern matching
• Meet mask quality and cost targets through accurate and exhaustive verification
• Leverage core technology that uniquely connects manufacturing information to design

Proteus™ OPC for advanced lithographic mask synthesis

• Perform full-chip optical proximity correction, inverse lithographic techniques, and process
  checking and analysis
• Enhance pattern fidelity and maximize the process window
• Identify traditional process failures before committing a design to manufacture
• Leverage rigorous Sentaurus™ simulation reference flows within the manufacturing environment

 The industry standard for yield management and optimization

• Bring yield-relevant data from diverse sources into a single data bank with the Yield Explorer® tool
• Quickly identify tools and processes that impact yield with Odyssey defect data management
• Enable closer collaboration between product/design groups and FA labs with Avalon
• Implement a complete wafer fab solution with a single unified database using the YieldManager® tool