CATS' industry-standard fracturing and superior jobdeck graphics join in a unique option known as Jobdeck Smashing. Whether it is for the generation of photomask inspection data or for creating optimized E-beam data for today's high-end exposure tools, Jobdeck Smashing allows the user to fracture all of the pattern data in jobdeck contained within the specified fracture limits into a single pattern file.
Although the various E-beam formats allow multiple pattern files to be combined through the jobdeck, inspection tools typically require the inspection database to be presented as a single file. CATS provides the user with the ability to convert from any format CATS can read, including jobdecks, to any of the supported optional inspection formats.
Another key use for this capability lies in the fact that many of today's most advanced E-beam exposure tools prefer to see large segments of data at one time to minimize stage travel time and maximize throughput. While it tends to be simpler from the design and early data preparation stand point to present the tool with several, smaller and more manageable pattern files, some tools perform more efficiently with a single large pattern file that can be produced through CATS Jobdeck Smashing.
Yet another powerful combination will be CATS Jobdeck Smashing and CATS MRC; manufacturing rule checks. MRC provides the user with the ability to perform high-speed width and space verifications on any file CATS can read; and that includes jobdecks. For the first time, designers and photomask manufactures will have the ability to run DRC-like verifications on post-fractured data and jobdecks. After all, a DRC is only valid through the design stage. It does nothing to verify that the manipulations common to both standard photomask data preparation procedures, as well as the many potential pattern manipulations that can occur in the jobdeck, have not created design rule violations or created a situation that is non-optimal for photomask exposure or inspection.