Basic and Advanced Fracture

CATS fracturing is at the heart of the CATS package

CATS Fracturing, and the associated options and capabilities, is the heart of the CATS package. A few definitions can help with the following details. First, a "library file" refers to a structured design file and secondly a "flat file" refers to an unstructured lithography file. Fracture operations can include:

  1. Conversion of polygons in design data (CIF™, Applicon™, DXF™ or GDS-II™, OASIS®) to rectangles and trapezoids in an E-beam tooling file or inspection database
  2. Conversion of rectangles and rotated rectangles in an optical pattern generator data file.
  3. Refracture of a set of data to perform scaling or sizing operations.

Fracture Options Include:

Format: Specification of the output file format per the output lithography options

Resolution: Defines the smallest resolvable unit in the output file.

Sizing: Symmetric or Asymmetric sizing of individual rectangles and trapezoids

Scaling: Specify any continuous scale factor to be applied to the data during fracture.

Grow: Positive or negative incremental biasing after sizing , scale and Boolean operation

Booleans: OR, AND, XOR, MINUS and COMPARE; combination or comparison of two input files.

Overlap Removal: Heal and/or combine neighboring or overlapping figures.

Data Compaction: Set of algorithms for generating arrays from either arrayed or non-arrayed input.

Blanking & Filling: Specify areas in the input file to be ignored or filled during fracture.

Prune: Specify library structure(s) to be ignored during fracture.

Reverse Tone: Allows the data to be reversed during the fracture.

Rotation: Rotate input data in increments of 90-degrees or mirror about increments of 45-degrees.

Select: Methods for selecting data from the input file to be used during graphic drawing and fracture.

Stripe Shape: Output data block or stripe height and width per the rules of the output format.