CATS fracturing is at the heart of the CATS package
CATS Fracturing, and the associated options and capabilities, is the heart of the CATS package. A few definitions can help with the following details. First, a "library file" refers to a structured design file and secondly a "flat file" refers to an unstructured lithography file. Fracture operations can include:
- Conversion of polygons in design data (CIF™, Applicon™, DXF™ or GDS-II™, OASIS®) to rectangles and trapezoids in an E-beam tooling file or inspection database
- Conversion of rectangles and rotated rectangles in an optical pattern generator data file.
- Refracture of a set of data to perform scaling or sizing operations.