Sentaurus Process

An advanced 1D, 2D and 3D process simulator

Sentaurus Process is an advanced 1D, 2D and 3D process simulator for developing and optimizing silicon semiconductor process technologies. It is a new-generation process simulator for addressing the challenges found in current and future process technologies. Equipped with a set of advanced process models, which include default parameters calibrated with data from equipment vendors, Sentaurus Process provides a predictive framework for simulating a broad range of technologies from nanoscale CMOS to large-scale high-voltage power devices. Sentaurus Process is part of a comprehensive suite of core TCAD products for multi-dimensional process, device, and system simulations, embedded into a powerful user interface.


  • Fast prototyping, development, and optimization of a broad range of technologies with comprehensive physics-based process modeling capabilities
  • Enhance device performance by optimization of thermal and mechanical stress in process structures with stress history
  • Provides insights into advanced physical phenomena through self-consistent multi-dimensional modeling capabilities