Sentaurus Lithography represents advanced lithography simulation for semiconductor device manufacturing process development and optimization. It covers a wide range of applications in proximity printing, optical, immersion, extreme ultraviolet (EUV), and electron beam (e-beam) lithography. Process-limiting effects within the imaging system of an exposure tool can be thoroughly analyzed, taking the impact of mask and substrate topography on photoresist patterning into account. Interfacing Sentaurus Lithography with Sentaurus Topography allows a seamless modeling of complex integration techniques such as double-patterning. The link between Sentaurus Lithography and other Synopsys tools in the area of design and mask synthesis accelerates the generation of optical proximity correction (OPC) models, and helps to minimize process sensitivity.