SPIE Advanced Lithography 2020
February 23-27, 2020
San Jose McEnery Convention Center
Monday, February 24
12:30 p.m. to 4:30 p.m.
San Jose Marriott Hotel
Salon IV Ballroom
301 South Market Street
San Jose, CA 95113
IMPORTANT NOTE: The location has changed from the San Jose Hilton in 2019 to the Marriott Hotel this year. See you at the Marriott!
Please join us for our 2020 Technical Forum to learn the latest on Synopsys Manufacturing's mask synthesis, mask data prep and lithography simulation solutions. The Technical Forum is peer-to-peer, giving you the opportunity to hear how your lithography colleagues have addressed the challenges of 3/5nm and beyond.
||Registration & Lunch
||Welcome and Introduction
||The Complete Picture: How Simulation Helps Avoid And Overcome On-Wafer Roadblocks
||Break and Drawing #1
||Accelerated Rigorous M3D Verification for Advanced Detection of DRAM Hotspot Failures
||Navigating The New Landscape Of Challenges Facing Design And Lithography Within The Era Of 3-D Integrated Devices
||Thank You and Drawing #2
Visit Synopsys at Booth #204
Tuesday, February 25: 10:00 a.m. - 5:00 p.m.
Wednesday, February 26: 10:00 a.m. - 4:00 p.m.
San Jose McEnery Convention Center
San Jose, CA
Synopsys provides industry-proven EDA solutions to meet the demands of today’s advanced IC manufacturing processes while setting the standard in platform flexibility to enable innovative and custom solutions for next-generation technology nodes. Synopsys’ comprehensive Mask Synthesis, Mask Data Preparation, TCAD, and Yield Management tools provide leading edge performance, accuracy, quality, and cost of ownership for all your production and development needs.
Synopsys Technical Program
- Lithographic pattern formation in the presence of aberrations in anamorphic optical systems
Zac A. Levinson, Synopsys, Inc. (USA); Bruce W. Smith, Rochester Institute of Technology (USA) [11323-6]
Monday, 1:20 p.m. to 3:20 p.m.
- EUV lithography stochastic simulations of a MOx-specific parameterized resist model: calibration and comparisons with experimental data
Craig D. Needham, Amrit K. Narasimhan, Inpria Corp. (USA); Lawrence S. Melvin, Synopsys, Inc. (USA); Ulrich Welling, Synopsys GmbH (Germany); Stephen Meyers, Inpria Corp. (USA) [11323-12]
Monday, 3:50 p.m. to 5:50 p.m.
- Prediction of EUV stochastic microbridge probabilities by lithography simulations
Erik A. Verduijn, Synopsys GmbH (Belgium); Ulrich Welling, Jiuzhou Tang, Hans-Jürgen Stock, Ulrich Klostermann, Wolfgang Demmerle, Synopsys GmbH (Germany); Peter De Bisschop, imec (Belgium) [11323-16]
Tuesday, 10:30 a.m. to 12:30 p.m.
- EUV resist chemical gradient enhancement by UV flood exposure for improvement in EUV resist resolution, process control, roughness and sensitivity
Seiji Nagahara, Tokyo Electron Ltd. (Japan); Cong Que Dinh, Tokyo Electron Kyushu Ltd. (Japan); Keisuke Yoshida, Tokyo Electron Kyushu Ltd. (Belgium); Gosuke Shiraishi, Yoshihiro Kondo, Kosuke Yoshihara, Tokyo Electron Kyushu Ltd. (Japan); Kathleen Nafus, Tokyo Electron America, Inc. (Belgium); John S. Petersen, Danilo De Simone, Philippe Foubert, Geert Vandenberghe, imec (Belgium); Hans-Jürgen Stock, Balint Meliorisz, Synopsys GmbH (Germany) [11326-9]
Tuesday, 10:30 a.m. - 10:50 a.m.
- Establishing fast, practical, full-chip ILT flows using Machine Learning
Tom Cecil, Ahmed S. Omran, Jason Shu, Amyn Poonawala, Clark Vandam, Jiechang Hou, Kyle Braam, Synopsys, Inc. (USA) [11327-4]
Tuesday, 1:40 p.m. - 2:10 p.m.
- Mask synthesis using machine learning software and hardware platforms
Peng Liu, Synopsys, Inc. (USA) [11327-5]
Tuesday, 2:10 p.m. - 2:40 p.m.
- Simulation of photoresist defect transfer through subsequent patterning processes
Dominik Metzler, IBM Thomas J. Watson Research Ctr. (USA); Sagarika Mukesh, Karthik Yogendra, IBM Corp. (USA); Mohamed Oulmane, Synopsys Switzerland, LLC (Switzerland); Phil Stopford, Lawrence Melvin, Synopsys, Inc. (USA) [11329-18]
Wednesday, 8:00 a.m. to 10:00 a.m.
- Rigorous simulation of implant resist on topographic wafer
Jirka Schatz, GLOBALFOUNDRIES Dresden Module One LLC & Co. KG (Germany); Bernd Küchler, Wolfgang Hoppe, Synopsys GmbH (Germany); Dimitrios Tsamados, Synopsys GmbH (Switzerland) [11327-15]
Wednesday, 8:40 a.m. - 9:00 a.m.
- Implementing Machine Learning OPC on product layouts
Kevin Hooker, Marco Guajardo, Hesham Abdelghany, Synopsys, Inc. (USA); Chia-Chun Lu, Synopsys, Inc. (Taiwan) [11328-4]
Wednesday, 9:20 a.m. - 9:40 a.m.
- Advanced memory cell design optimization with inverse lithography technology
Jiro Higuchi, Weiting Wang, Takamasa Takaki, Hiromitsu Mashita, Shigeki Nojima, Kioxia Holdings Corp. (Japan); Ahmed S. Omran, Synopsys, Inc. (USA); Ken Hanafusa, Nihon Synopsys G.K. (Japan); Seung-Hee Baek, Synopsys Korea Inc. (Korea, Republic of); Ryan Chen, Synopsys, Inc. (USA); Yukio Asaka, Nihon Synopsys G.K. (Japan); Kyle Braam, Synopsys, Inc. (USA); Hironobu Taoka, Nihon Synopsys G.K. (Japan); Guangming Xiao, Synopsys, Inc. (USA) [11328-5]
Wednesday, 9:40 a.m. - 10:00 a.m.
- DTCO acceleration to fight scaling stagnation
Lars W. Liebmann, Jeffrey Smith, Daniel Chanemougame, Tokyo Electron Ltd. (USA); Chia-Tung Ho, Jonathan Cobb, Pete Churchill, Synopsys, Inc. (USA) [11328-11]
Wednesday, 1:40 p.m. - 2:10 p.m.
- Integrating enhanced hotspot library into manufacturing OPC correction flow
Bradley J. Falch, Linghui Wu, Synopsys, Inc. (USA); John Tsai, Synopsys Taiwan Co., Ltd. (Taiwan); Elsley Tan, Synopsys, Inc. (Taiwan); Jiunhau Fu, Tengyen Huang, Chuncheng Liao, Nanya Technology Corp. (Taiwan) [11328-13]
Wednesday, 2:30 p.m. - 2:50 p.m.
- Rigorous stochastic lithography modelling for defectivity reduction in EUV single expose patterning
Ulrich Welling, Synopsys GmbH (Germany) [11323-39]
Wednesday, 4:10 p.m. to 4:50 p.m.
- An application study on the stochastic effect of EUV photons
Jongsu Kim, Hyekyoung Jue, Hyungju Ryu, Sang-Jin Kim, Joon-Soo Park, Kyoungsub Shin, SAMSUNG Electronics Co., Ltd. (Korea, Republic of); Eun-Soo Jeong, Sang-Yil Chang, Jung-Hoe Choi, Synopsys Korea Inc. (Korea, Republic of); Ulrich Welling, Jürgen Preuninger, Ulrich Klostermann, Hans-Jürgen Stock, Wolfgang Demmerle, Synopsys GmbH (Germany) [10323-45]
Thursday, 8:00 a.m. to 10:20 a.m.
- Multi-varied implementations with common underpinnings in Design Technology Co-Optimization
Kevin Lucas, Tim Tsuei, Soo-Han Choi, John Kim, Synopsys, Inc. (USA) [11328-32]
Thursday, 4:30 p.m. - 5:00 p.m.
- Compact modeling to predict and correct stochastic hotspots in EUVL
Zac A. Levinson, Yudhishthir Kandel, Qiliang Yan, Makoto Miyagi, Xiaohai Li, Kevin Lucas, Synopsys, Inc. (USA) [11323-71]
Wednesday, 5:30 p.m. to 7:30 p.m.
- Impact of flare on source mask optimization in EUVL for 7nm technology node
Lisong Dong, Rui Chen, Taian Fan, Rongbo Zhao, Institute of Microelectronics (China); Yongdong Wang, Lawrence S. Melvin, Synopsys, Inc. (USA) [11323-81]
Wednesday, 5:30 p.m. - 7:30 p.m.
- Implementing Machine Learning for OPC retargeting
Kevin Hooker, Marco Guajardo, Synopsys, Inc. (USA); Nai-Chia Cheng, The Univ. of Southern California (USA) [11328-50]
Wednesday, 5:30 p.m. - 7:30 p.m.
Schedule a Meeting
If you are planning to attend SPIE Advance Lithography and would like to schedule an onsite meeting with the Synopsys Manufacturing team, please send an email to firstname.lastname@example.org with your full name, business title, company name, phone number, and the subject you’d like to discuss.