Tools Used: RSoft BeamPROP & Sentaurus TCAD
Silicon Photonics has the potential to offer a high-performance and low power solution for the electrical interconnect bottleneck. As one of the key optoelectronic building blocks, high speed silicon optical modulators compatible with established CMOS fabrication infrastructure have been extensively studied recently[1]. This example demonstrates the simulation of a 3D Mach-Zehnder Modulator (MZM) implemented on silicon-on-insulator, using Synopsys’ Sentaurus TCAD and RSoft tools.