Tools Used: TCAD, BeamPROP
This application note demonstrates the simulation of a 2D phase shifter cross-section to be used in a modulator. The phase shifter simulation is entirely run via Synopsys’ Sentaurus Workbench (SWB), allowing the project to be easily shared between various functional groups in an organization. For example, one group could author the S-Process step, and another the S-Device and optical steps. Each group can then experiment with the entire project without needing a full understanding of all steps.
The output of the modal effective index vs. applied voltage, effective index vs. wavelength, and frequency response of a 2D phase shifter for modulator design is demonstrated. These are typical parameters used to build a compact model for the phase shifter, other parameters can be calculated/extracted as needed.