PDK LIGENTEC (Silicon Nitride)

The silicon nitride process design kit contains the mask layers, building blocks, material properties, and design rules for the AN800 and AN150 processes, and tested building blocks for wavelength operation of 1550nm, 1320nm and 900nm are available

LIGENTEC process offers a state of the art, cost-effective platform with very high geometric accuracy. This PDK is a plug-in library for OptoDesigner. In addition to the photonic elements from the standard OptoDesigner library, the PDK contains technology-specific information like mask layer names, design rules, validated building blocks co-developed with VLC Photonics, and settings to generate GDS file settings..

PDK contents AN800 v8.2.0.1 and AN150 v1.1.0.3 platform

The two PDKs are available for AN800 (800 nm SiN) optimized for applications in 1310 nm and 1550 nm while the AN150 (150 nm SiN) is optimized for applications in lower wavelengths from 950 nm to the visible.

The thick waveguides enable small bend radii and compact designs with very low propagation losses. Those waveguides can maintain linear behavior at high optical power levels and provide access to unique features of anomalous dispersion for integrated non-linear optics. The high-power threshold enables applications such as LIDAR to propagate watts of power in the waveguides.

The PDK includes:

  1. Technology set-up files
  2. Die templates for layout generation
  3. Two versions of highly efficient heater modules (large tuning, fast modulation)
  4. Bonding module for flip chip integration
  5. Spot converter modules for SMF28, lensed fiber, or PIC butt-coupling
  6. Packaging compatibility module
  7. SiN waveguide-based passive building blocks
    • Ultra low loss spirals
    • MZI, MMI
    • Ring resonators
    • Tapers
    • Rib waveguides
  8. Design Rules
  9. GDSII mask file generation

LIGENTEC Photonics MPW Runs

The LIGENTEC-VLC PDK is available for approved customers and distributed for users of MPW and dedicated runs. Request access by sending an email to LIGENTEC (info@ligentec.com).

Once the procedure is complete, LIGENTEC will provide you with a PDK installer compatible with the latest version of OptoDesigner.


For other requests, you can contact LIGENTEC at info@ligentec.com.