The SiGe PD structure is described in detail in the following reference:
Assefa, Solomon, et al., "CMOS-integrated high-speed MSM germanium waveguide photodetector", Optics Express 18 No. 5 (2010), 4986-4999.
To simulate the PD, we will use Sentaurus TCAD for the layout and the electronic simulation. We will use RSoft products to calculate the optical absorption; either RSoft FullWAVE or BeamPROP tools can be used for this purpose.
The simulation is run in Sentaurus Workbench (SWB), and broadly consists of three main steps:
- Create the geometry in SDE
- Run the optical simulation in RSoft
- Use S-Device and Inspect for the electronic simulation and the data visualization