HOME    TOOLS    MANUFACTURING    SYNOPSYS AT SPIE ADVANCED LITHOGRAPHY 2014

Synopsys Papers and Presentations at SPIE

Improving 3D Resist Profile Compact Modeling by Exploiting 3D Resist Physical Mechanisms

Please complete the following form then click 'continue >>' to complete the download. Note: By registering, you acknowledge and agree to the terms of the Synopsys Privacy Policy.
Required Required Fields

Business Email:Required
First Name:Required
Last Name:Required
Phone:Optional
Job Title:Required
Company:Required
Division:Optional
Country:Required
Address 1:Required
Address 2:Optional
City:Required
State/Province:
Optional
Postal/Zip Code:Required