This Sentaurus TCAD simulation project provides a template setup for the process emulation of a deep submicron 3D NMOS transistor. Sentaurus Structure Editor is used to create a generic 50 nm transistor in 3D and this transistor is intended to serve as a convenient starting point for any deep submicron simulation project. The Sentaurus Workbench template project also performs certain device simulations to extract key electrical parameters in order to facilitate the transition from process emulation to device simulation.

NMOS device geometry at end of process emulation (one-quarter of device is shown)

NMOS device doping and meshing information (a quarter of the device is shown)

The simulation project is part of the Sentaurus TCAD distribution at:

../Example_Library/CMOS/NMOS_procem